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光刻

光刻

我们的光刻过滤器可有效滤除光刻工艺化学品中的污染物和缺陷。它们可减少化学品废物以及缩短更换过滤器相关的启动时间,实现更好的滤除...

化学相容

光刻过滤器-减少涂层缺陷和提高产率

光刻涂层需要避免颗粒、金属、有机材料和气泡。为了避免涂层出现缺陷,过滤器的滤留率必须非常高,同时可将污染源降至最低。颇尔光刻过滤器可选各种膜材,可有效清除光刻工艺化学品中的污染物和缺陷。它们可减少化学品废物以及缩短更换过滤器相关的启动时间,比原有产品提供更佳的清除特征和超级初始清洁度。

 

在选择合适的光刻过滤器时,必须考虑几个因素。主体过滤器和使用点(POU)分配过滤器可避免有害颗粒沉积。POU过滤器是精密分配系统的一部分,要小心选择该过滤器,以减少晶圆表面上的缺陷。使用点分配采用优化设计、扫过流路设计和优异的冲洗特征都很关键。

 

除了清除颗粒和凝胶外,POU过滤器选择的关键因素还包括尽量少形成微泡、减少化学品消耗和良好相容性。颇尔过滤器采用优化设计,可与各种光刻溶剂化学相容,包括PGMEA、PGME、EL、GBL和环丙烷。启动时可减少化学品使用,使用大型表面积。因此,低压差实现最高凝胶清除效率和生成最少微泡。在工艺过程中,光化学品从高压向低压分配时,低工作压力确保过滤器不会导致光化学品脱气。

 

优点:

  •  缩短设备关闭时间
  • 提高产率
  • 增加化学品和分配喷嘴寿命
  • 各种滤膜用于各种光刻应用
  • 快速通风设计(产生最少微泡)
  • 减少化学品废物

 

我们的光刻过滤器技术使制造过程流线化,缩短分配系统关闭时间,减少晶圆表面缺陷。有关更多信息,请联系颇尔专家咨采购信息。     

有关提高工艺效率的更多信息,请联系我们的过滤专家团队。

 

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